Microdevice Processing Innovation: Application of Femtosecond Laser Technology in the Manufacturing of Micromechanical Devices

Microdevice Processing Innovation: Application of Femtosecond Laser Technology in the Manufacturing of Micromechanical Devices

In the field of micro and nanotechnology, manufacturing precision microdevices is an extremely challenging task, especially when extremely high dimensional accuracy and surface quality are required. Recently, a research team from Tsinghua University demonstrated an integrated push-pull micromechanical device in the paper "An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment" published in "Extreme Mechanics Letters" , the design, fabrication and in-situ experiments of this device provide new possibilities for micro- and nanoscale mechanical experiments. In this study, femtosecond laser ultra-fine cold processing technology provides an efficient and accurate solution for cutting precision micro-instruments with a minimum rib width of 5 μm on stainless steel. This achievement not only demonstrates the potential of second-second laser ultra-fine cold processing technology in micro- and nanoscale precision manufacturing, but also provides new ideas and methods for the design and manufacturing of future micromechanical devices.

Traditional micromechanical device manufacturing technologies, such as photolithography and focused ion beam (FIB) etching, although capable of achieving high-precision processing, are often costly, inefficient, and have certain limitations when processing hard materials such as stainless steel. sex. The emergence of femtosecond laser ultra-fine cold processing technology, with its unique ultra-short pulse width and ultra-high peak power characteristics, can achieve sub-micron level fine cutting without damaging the material surface. In the team's research, femtosecond laser ultrafine cold processing technology was used to create an integrated micromechanical device that can simultaneously measure the force and deformation of the test sample. The design of the device is based on high-resolution image sequences, enabling force and deformation measurements without the need for external commercial force sensors. This design not only improves the accuracy of measurement, but also greatly reduces the complexity and cost of the device.

Sample pictures (measurement data)

In the actual manufacturing process, femtosecond laser ultra-fine cold processing technology shows its unique advantages. First of all, the pulse duration of the femtosecond laser is much shorter than the thermal relaxation time, and no heat is generated during the processing. It is commonly known as "cold" processing. The femtosecond laser can be used to perform ultra-fine cutting, drilling, etching and other processing on any material. It can directly avoid phenomena such as overheating, cracking, oxidation, and melting of materials due to heat accumulation during conventional long-pulse laser processing. Secondly, femtosecond laser processing does not require a mask, which not only simplifies the processing process but also reduces manufacturing costs. In addition, the ultra-high peak power of femtosecond laser makes it non-selective to processing materials and can process any material, such as metals, non-metals, high-temperature alloys, semiconductors, ceramics and polymers, etc., which is a good foundation for micro-mechanical devices. Design and manufacturing provide greater flexibility.

Femtosecond laser processing

This research is supported by the femtosecond laser ultra-fine cold processing technology provided by Shenzhen Monochrome Technology Co., Ltd. Monochrome Technology has profound technical accumulation and practical experience in the field of femtosecond laser technology. The femtosecond laser equipment provided can process stainless steel, etc. Achieve fine micro-machining on various materials, including carbonization-free cutting, high aspect ratio drilling and fixed depth etching, etc. Its high precision and stability make it a better choice for the manufacturing of micro-mechanical devices.

Five-axis femtosecond laser precision cutting equipment